Effects of phase-lag on thermoelastic damping in micromechanical resonators

Abstract

The present article attempts to investigate thermoelastic damping (TED) of a microbeam resonator by employing the three-phase-lag (TPL) thermoelasticity theory proposed by Roychoudhuri. An explicit formula of TED has been derived and the effects of the beam height, the phase-lag parameters on TED of the microbeam resonator have been studied. Effects of beam height and phase-lags on TED have been shown with the numerical results. A comparison of the results with the corresponding results of the theory of thermoelasticity of type GN-III is also presented. It has been observed that GN-III predicts a high-quality factor of the resonator’s sensitivity as compared to TPL model. © 2018 Taylor & Francis.