Analytical models for square diaphragm piezoresistive NEMS pressure sensor

Abstract

Nano Electromechanical Systems (NEMS) sensors are the next miniaturization step from Micro Electromechanical System (MEMS) devices. These devices form promising future generation of MEMS technology due to probable benefits of greater efficiency, extremely reduced size and lower cost of production. In the present work also modeling of square diaphragm piezoresistive NEMS pressure sensor has been done using the available analytical models from the previous work of the authors for MEMS pressure sensor after their optimization to match with Finite Element Methods (FEM) simulation results. The optimization is done for different aspect (thickness / length) ratios of the diaphragm due to dependence of the design parameters on aspect ratios. This work presents a set of tools to design NEMS pressure sensors for all feasible aspect ratios and may be found useful to the designers and researchers of pressure sensor. © 2013 IEEE.