A doping dependent threshold voltage model of uniformly doped short-channel symmetric double-gate (DG) mosfet's

Abstract

The paper presents a doping dependent threshold voltage model for the short-channel double-gate (DG) MOSFETs. The channel potential has been determined by solving the two-dimensional (2D) Poisson's equation using the parabolic potential approximation in the vertical direction of channel. Threshold voltage sensitivity on acceptor doping and device parameters is discussed in detail. The threshold voltage expression has been modified by incorporating the effects of band gap narrowing for highly doped DG MOSFETs. Quantum mechanical corrections have also been employed in the threshold voltage model. The theoretical results have been compared with the ATLAS™ simulation results. The present model is found to be valid for acceptor doping variation from 10 14 cm -3 to 5 × 10 18cm -3. © 2011 SumDU.