Fabrication and characterisation of Gridded gate Pt/SiO2/Si MOS sensors for hydrogen and hydrogen containing Gases

Abstract

In the present work fabrication and characterization of gridded gate Pt/SiO2/Si MOS sensor has been proposed for the detection of the hydrogen and hydrogen containing gases. In the recent year several impact on the environment due to burning of fossils fuels have attracted the modern world from clean energy sources; Hydrogen has been used as clean energy sources in many industries like chemical , food , semiconductor, petroleum research laboratory etc It is well known fact that hydrogen is inflammable, explosive and hazardous gas. In order to have a safe working environment its continuous monitoring is required. Hydrogen sensors form an integral part of any such system incorporating hydrogen as a fuel. Over the past several years much attention has been focused on the development of micro gases sensors for various application ranging from detection of toxic gases to monitoring of the gases that are used in industries for manufacturing purpose. The demand of better environmental control and safety and that with less expensive way has commenced the increased activities in the field of solid state gas sensors.