Optimization of piezoelectric energy harvesting structure by segmenting the piezoelectric layer(s)

Abstract

We present an optimized MEMS piezoelectric energy harvester structure. Optimization is done in two ways, using better piezoelectric and substrate materials and changing the shape of the harvester structure. First, a conventional cantilevered bimorph harvester structure is used. Then, two more different types of structures with a segmented piezoelectric layer(s) of the bimorph are proposed, and a comparative simulation study using Comsol Multiphysics is reported. We have found that that segmentation of piezoelectric layer(s) results in better output electrical quantities. © 2017 IEEE.