Enhanced Sensing Performance of Nanostructured SnO 2 Sensor Through Oxygen Plasma Treatment

Abstract

Manifold higher response for ammonia detection has been accomplished by the influence of oxygen (O 2 ) plasma treatment on sol-gel spin coated nanostructured SnO 2 sensor. The response of the sensor increases with the O 2 plasma treatment. The response of the sensor is investigated at room temperature for different plasma treatment durations and compared with untreated sensor. The % response of the plasma treated sensors is found to be more than twice as compared to untreated sensor with improved response and recovery time. Elemental analysis, topography and surface morphology have been studied using energy-dispersive X-ray spectroscopy (EDX), atomic force microscopy (AFM) and scanning electron microscopy (SEM) respectively. © 2018 IEEE.